Dressing characteristics of oriented single diamond on cmp polyurethane pad

Journal

Machining Science and Technology

Journal Volume

13

Journal Issue

1

Pages

92-106

Date Issued

2009

Author(s)

Tsai, M.Y.

YUNN-SHIUAN LIAO

DOI

10.1080/10910340902776101

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448653

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-67650873200&doi=10.1080%2f10910340902776101&partnerID=40&md5=5f4b131a5e464149832eb8f5d1c2bd16

Type

journal article