The characteristic behavior of TMAH water solution for anisotropic etching on both Silicon substrate and SiO2 layer

Resource

Sensors and Actuators A Physcial 93: 132-137

Journal

Sensors and Actuators A

Pages

Physcia-l

Date Issued

2001

Date

2001

Author(s)

Chen, P.-H.

Peng, H.-Y.

Hsieh, J.-M.

Chyu, M. K.

URI

Type

journal article

File(s)

Name

29.pdf

Size

331.57 KB

Format

Adobe PDF

Checksum

(MD5):2e89b32203d5c740166449f6ec941fc6