Effects of Al-C ion-implantation and annealing in epitaxial 6H-SiC studied by structural and optical techniques
Resource
Materials Science Forum,264-268,693-696.
Journal
Materials Science Forum
Pages
264-268
Date Issued
1998-01
Date
1998-01
Author(s)
Feng, Z.C.
Ferguson, I.
Stall, R.A.
Li, K.
Shi, Y.
Singh, H.
Tone, K.
Zhao, J.H.
Wee, A.T.S.
Tan, K.L.
Adar, F.
Lenain, B.
Type
journal article