Fabrication and Characterization of A Piezoresistive Microcantilever Biosensor and System
Date Issued
2006
Date
2006
Author(s)
Hung, Chia-Ming
DOI
en-US
Abstract
Portable, miniaturized biomedical devices for on-site diagnosis and prognosis of diseases are recently becoming a great interest in bio-, nano- or micro-engineering research. The integrated biomolecular detection system was developed, which consists of micro-fabricated piezoresistive microcantilever-based sensor, micro-fluidic package, and electrical readout platform. This work has shown the device performance of converting the biomolecular recognition into a direct nanomechanical response of microfabricated cantilever beams. With the bottom-up assembly technology of biomolecule functionality and the top-down device microfabrication technology, the nanomechanics-based transduction establishes a biosensor platform in real-time, label-free, and quantitative analysis on biomolecular recognition and interaction.
The piezoresistance is one of the key of the electrical sensing of microcantilever beams, which was characterized by using the atomic force microscope (AFM). The gauge factor is obtained with approximate 22.25. The result of the microcantilever sensitivity was measured to be 8.862×10-7 nm-1, which presents a superior feature capable of probing a minute concentration of biomolecules. The result of biofilm-induced surface stress and thus converted electrical signal corresponding to biomolecular adsorption and protein-bound conformation change on the cantilever surface has been successfully measured.
Subjects
壓阻效應
壓阻式微懸臂粱
生物感測器系統
微機電製程
Piezoresistive Effect
Piezoresistive Microcantilever
Biosensor System
MEMS Fabrication
Type
thesis
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