Automatic Large Area Micro Manufacturing System for Two-Photon Polymerization
Date Issued
2014
Date
2014
Author(s)
Chen, Sheng-Yuan
Abstract
This thesis proposes an automatic large area micro manufacturing system for two-photon polymerization (TPP). This manufacturing system consists of several functions for improving the quality and efficiency of micro-fabrication. First, a 100 micro meters short range 3D piezo stage is fixed on top of a 30 mm long range XY stage, and a software is designed to control both of the two stages for large area micro manufacturing. For fabricating over large area, the precision of autofocus becomes more important. Therefore, optimizing the CMOS camera for enhancing performance of autofocus is carried out. Then, the automatic array fabrication is demonstrated by fabricating micro-spring array, micro-needle array, and Fresnel zone plate array. Some fabrication defects from acceleration and deceleration of piezo stage are corrected by software. Besides, to speed up the production, a diffractive optical element (DOE) is tested. This DOE can split the laser beam into 3x3 beam array to fabricate 3x3 array structures at one time. Finally, a scanning method for fabricating 2.5D structure over large area is implemented. By driving the translation stage to scan back and forth and doing tilt-correction through piezo stage, the 2.5D structures such as optical grating, grid, and blazed grating are successfully fabricated.
Subjects
雙光子聚合
雙光子吸收
微加工
自動對焦
陣列加工
繞射光學元件
Type
thesis
File(s)![Thumbnail Image]()
Loading...
Name
ntu-103-R01522613-1.pdf
Size
23.54 KB
Format
Adobe PDF
Checksum
(MD5):34650c738253c5080c696c233722b361