Interference Coatings Based on Synthesized Silicon Nitride
Resource
Applied Optics 38 (10): 2078-2082
Journal
Applied Optics
Journal Volume
38
Journal Issue
10
Pages
2078-2082
Date Issued
1999
Date
1999
Author(s)
Abstract
Silicon nitrides are synthesized by ion-assisted deposition with only one coating material and a nitrogen-ion-beam source. All the SiN(x) films are amorphous and mechanically strong. A wide range of refractive indices from 3.43 to 1.72 at a wavelength of 1550 nm is obtained. Near-IR antireflection coating and a bandpass filter based on the multilayers of SiN(x) and Si are demonstrated.
Type
journal article
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