Planarization of Amorphous Silicon Thin Film Transistors by Liquid Phase Deposition of Silicon Dioxide

Journal

IEEE Transactions on Electron Devices

Journal Volume

42

Journal Issue

11

Pages

1918-1923

Date Issued

1995

Author(s)

Chen, M.-S.

Chou, J.-S.

DOI

10.1109/16.469397

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0029409172&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/316600

Type

journal article