Development of a Novel High Resolution CMOS Flow Sensor
Date Issued
2005
Date
2005
Author(s)
Deng, Ya-Wei
DOI
en-US
Abstract
The study develops an integrated CMOS flow sensor applied in monitoring the flow condition in thermal module. The flow sensor has a high resolution in low speed air flow field. This sensor includes micro structures and mixed signal processor in 2 mm square chip die size fabricated by the standard CMOS process. The microstructures of sensor consist of a polysilicon micro heater and the thermopiles array. The center micro heater encircled by the temperature sensors generates the thermal plume. As the sensor is positioned against the flow, the thermal plume will be pushed towards to the temperature sensors array and the temperature difference can be converted into the voltage to determine the air flow speed. The flow sensors arrayed in four sides gives both output voltages in x-direction and y-direction, and the sensor makes splendid accomplishments as it is operated under impinging flow. Combining signal output from two perpendicular sensors, the module can make three components of velocity measurement. The sensitivity of the flow sensor can be indicated as 0.7 mV/ (m/s) under impinging flow and 0.001 m/s velocity measurement resolution is achieved. The air flow speed ranges from 0.1 to 3.6 m/s.
Subjects
CMOS流速感測器
微加熱器
熱電耦
熱氣團
速度量測解析度
CMOS flow sensor
Polysilicon micro heater
Thermopiles array
Thermal plume
Velocity measurement resolution
Type
thesis
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