High-quality nanothick single-crystal Y2 O3 films epitaxially grown on Si (111): Growth and structural characteristics

Journal

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Journal Volume

26

Journal Issue

3

Pages

1124-1127

Date Issued

2008

Author(s)

Lee, Y.J.

Lee, W.C.

Nieh, C.W.

Yang, Z.K.

Kortan, A.R.

Kwo, J.

Hsu, C.-H.

DOI

URI

URL

SDGs

[SDGs]SDG7

Type

journal article