Using an ammonia treatment to improve the floating-gate spacing in split-gate flash memory
Resource
IEEE Electron Device Letters 25 (9): 616-618
Journal
IEEE Electron Device Letters
Journal Volume
EDL-25
Journal Issue
9
Pages
616-618
Date Issued
2004-09
Author(s)
Chu, Wen-Ting
Lin, Hao-Hsiung
Tu, Yeur-Luen
Wang, Yu-Hsiung
Hsieh, Chia-Ta
Sung, Hung-Cheng
Lin, Yung-Tao
Tsai, Chia-Shiung
Wang, C.S.
SDGs
Type
journal article
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Format
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Checksum
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