Electrical characteristics of ultrathin Pt/Y2O3/Si capacitor with rapid post-metallisation annealing

Journal

Electronics Letters

Journal Volume

38

Journal Issue

24

Pages

1594-1596

Date Issued

2002

Author(s)

Lay, T.S.

Liu, W.D.

Kwo, J.

Mannaerts, J.P.

DOI

10.1049/el:20021058

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443469

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037153512&doi=10.1049%2fel%3a20021058&partnerID=40&md5=49b6d6cfa49210ab76f13f2e6dc99318

SDGs

[SDGs]SDG7

Type

journal article