Applying low-energy multipulse excimer laser annealing to improve charge retention of Au nanocrystals embedded in MOS capacitors
Journal
Journal of Physics D: Applied Physics
Journal Volume
48
Journal Issue
5
Pages
143-157
Date Issued
2015
Author(s)
Kuan-Yuan Shen
Hung-Ming Chen
Ting-Wei Liao
Chieh-Hsiung Kuan
CHIEH-HSIUNG KUAN
SDGs
Type
journal article