Systematic Investigation of Self-Heating Effect on CMOS Logic Transistors from 20 to 5 nm Technology Nodes by Experimental Thermoelectric Measurements and Finite Element Modeling
Journal
IEEE Transactions on Electron Devices
Journal Volume
64
Journal Issue
2
Pages
12.1.1-12.1.4
Date Issued
2017
Author(s)
SDGs
Type
journal article