Surface Integrity of Silicon Wafers in Ultra Precision Machining
Resource
International Journal of Advanced Manufacturing Technology,29((3-4)),372.
Journal
International Journal of Advanced Manufacturing Technology
Journal Volume
29
Journal Issue
(3-4)
Pages
-
Date Issued
2006
Date
2006
Author(s)
Young, HT
Liao, HT
Huang, HY
Type
journal article