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Initial Operation of a New High-Resolution Scanning Ion Microsprobe
Resource
Electron-Beam, X-ray and Ion-bean Techniques for Submicrometer Lithographies III, v.471, p.75-82
Journal
Electron-Beam, X-ray and Ion-bean Techniques for Submicrometer Lithographies III
Journal Volume
v.471
Pages
75-82
Date Issued
1984
Date
1984
Author(s)
Wang, Yuh-Lin
Type
conference paper