Extraction of heat transfer macromodels for MEMS devices

Journal

12th International Conference on Solid-State Sensors, Actuators and Microsystems

Journal Volume

2

Pages

1852-1855

Date Issued

2003

Author(s)

Yu, C.-C.

Yang, Y.-J.

DOI

10.1109/SENSOR.2003.1217149

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448558

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-2342656967&doi=10.1109%2fSENSOR.2003.1217149&partnerID=40&md5=b5bf5ef81d2f4c09fc2ad818027a5f4d

Type

conference paper