Stability of Slurry in Chemical Mechanical Polishing(2/2)

Date Issued

2001

Date

2001

Author(s)

DOI

892214E002049

URI

Subjects

Ferric oxide particles

spheroids

effect of operation conditions

critical coagulation concentration

Schulze-Hardy rule

Publisher

臺北市：國立臺灣大學化學工程學系暨研究所

Coverage

計畫年度：89
第二期;起迄日期：2000-08-01/2001-07-31

Type

report

File(s)

Name

892214E002049.pdf

Size

527.68 KB

Format

Adobe PDF

Checksum

(MD5):18e500a98dbc6e412ddd5636e86295cc