Anomaly detection for semiconductor tools using stacked autoencoder learning

Journal

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Journal Volume

2018-December

Date Issued

2019

Author(s)

Liao, D.-Y.

Chen, C.-Y.

Tsai, W.-P.

Chen, H.-T.

Wu, Y.-T.

DOI

URI

URL

SDGs

[SDGs]SDG9

Type

conference paper