A Novel Fabrication Method of Microlens Array with Aperture Stop for Projection Photolithography
Date Issued
2006
Date
2006
Author(s)
Wu, Meng-Sheng
DOI
zh-TW
Abstract
Microlens lithography is a contactless lithographic method that uses a smart mask which consists of an array of spherical microlens to project the pattern on transparent mask onto a photo-resist layer. The array of microstructures can be fabricated in a single exposure step. This technique provides a simple route for the large area, parallel fabrication of microstructures. However, the fabrication of polymer microlens array with aperture stops involves alignment and electroplating processes. They are complicated, time consuming and require expensive facilities.
In this study, we report an innovative method for fabrication of plastic microlens arrays with aperture stops. By using gas pressure, thermoplastic film is pressed onto the stainless steel, which has micro-holes array. The polymer material is partially filled into the circular holes, and forms hemispherical surface due to surface tension. After cooling, a plastic microlens array with stainless steel shadow mask can be obtained. The aperture stops of microlens array can be directly fabricated without complicated alignment and electroplating processes.
With the fabrication plastic microlens array with aperture stop, a microlens lithography facility has been designed, constructed and tested. Arrays of microstructure has been successfully fabricated. The feature sizes of microstructures produced by this method can be changed by adjusting the size, shape of the lenses, the figure size of the mask, and the image distance between the lens array and photo-resist.
In addition, the array of microstructures produced by this method can be transferred to other materials using PDMS casting, electroforming and micro-molding. We believe this type of technology will be useful for the fabrication of optoelectronics and bio-devices that consist of repetitive microstructures.
Subjects
微透鏡陣列
投影式微影
氣體熱壓
類LIGA
軟模
紫外光固化
microlens array
projection photolithography
hot embossing
LIGA-like
PDMS soft mold
UV curing
Type
thesis
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