Precision robust control for a three dimensional PZT stage

Journal

SICE Annual Conference

Pages

474-479

Date Issued

2013

Author(s)

Tsai Y.-C.

Wu R.-C.

Yen J.-Y.

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84888601766&partnerID=40&md5=9b31fdf0383b443d71a663c0bb412ea6

https://scholars.lib.ntu.edu.tw/handle/123456789/412601

Publisher

Society of Instrument and Control Engineers (SICE)

Type

conference paper