Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching

Journal

Applied Optics

Journal Volume

48

Journal Issue

26

Pages

4996-5004

Date Issued

2009

Author(s)

Mendoza-Galván, A.

Järrendahl, K.

Arwin, H.

Huang, Y.-F.

Chen, K.-H.

DOI

10.1364/AO.48.004996

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503337

Publisher

OSA - The Optical Society

Type

journal article