The modeling and control of the cluster tool in semiconductor fabrication

Resource

Robotics and Automation, 2001. Proceedings 2001 ICRA. IEEE International Conference on

Journal

IEEE International Conference on Robotics and Automation

Pages

-

Date Issued

2001

Date

2001

Author(s)

Wang, Che-Lung

DOI

DOI

1050-4729

URI

Type

journal article

File(s)

Name

00932874.pdf

Size

743.32 KB

Format

Adobe PDF

Checksum

(MD5):d542974e11b8d6b25051f371ed44a12c