Design and control of a long-traveling nano-positioning stage
Journal
Precision Engineering
Journal Volume
34
Journal Issue
3
Pages
497-506
Date Issued
2010
Author(s)
Abstract
In this paper, a Dual-Axis Long-Traveling Nano-Positioning Stage (DALTNPS) is presented. In order to extend the traveling and increase the accuracy, the two sorts of stages, a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage, were composed. The traditional ball-screw stage which is composed of two guide-ways and a ball-screw at each axis is a long-travel stage, and the 3-DOF piezo-stage, which is composed of three piezoelectric actuators and four translation-rotation mechanisms, is a high precision stage. In addition, a 3-DOF measuring system and a PID controller are composed of a 3-DOF closed-loop controller and applied to implement the DALTNPS. The measuring system which is composed of two laser interferometers and two plane mirrors is a 3-DOF optical measuring system. Thus, the position at the x and y axes and the rotation around the z axis can be obtained and they are the responses of DALTNPS. Finally, the experiment results evidence that the DALTNPS is characterized by long-travel, high linear accuracy, high rotation accuracy, high contouring accuracy and high motion speed. ? 2010 Elsevier Inc. All rights reserved.
Subjects
Ball-screw
Closed loop controllers
Contouring accuracy
Design and control
Dual axis
High precision stage
Laser interferometer
Long-travel
Measuring systems
Nano-positioning
Optical measuring systems
PID controllers
Plane mirrors
Rotation accuracy
Rotation mechanism
Interferometers
Laser interferometry
Measurement theory
Mirrors
Piezoelectric actuators
Proportional control systems
Rotation
Spheres
Type
journal article