Publication:
Stitching periodic submicron fringes by utilizing step-and-align interference lithography

Date

2009

Authors

Chen, Y.-P.;Chen, C.-H.;Chang, J.-H.;Chiu, H.-C.;Chen, G.-Y.;Chiang, C.-H.;Chen, L.-S.;Tseng, C.-T.;Lee, C.-H.;Yen, J.-Y.;Wang, L.A.

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/497251

Collections

Electrical Engineering / 電機工程學系