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College of Engineering / 工學院
Engineering Science and Ocean Engineering / 工程科學及海洋工程學系
Design of void-based photonic crystal EUV mirror, supplementary zones-surrounded Fresnel lens, and EUV inspection system
Details
Design of void-based photonic crystal EUV mirror, supplementary zones-surrounded Fresnel lens, and EUV inspection system
Journal
2019 International EUVL Workshop in Taiwan
Date Issued
2019
Author(s)
Jia-Han Li*
JIA-HAN LI
URI
http://140.127.232.76/file/20190516_jiahanli.pdf
https://scholars.lib.ntu.edu.tw/handle/123456789/590834
Type
conference paper