Modeling and Emulation of a Furnace in IC Fab Based on Colored-Timed Petri Net

Resource

IEEE Trans. on Semiconductor Manufacturing 11 (3): 410-420

Journal

IEEE Trans. on Semiconductor Manufacturing

Journal Volume

11

Journal Issue

3

Pages

410-420

Date Issued

1998-08

Date

1998-08

Author(s)

Lin, S.Y.

Huang, H.P.

URI

Type

journal article

File(s)

Name

28.pdf

Size

244.5 KB

Format

Adobe PDF

Checksum

(MD5):b1f1d1b76244edb413b272c1261139b9