Compact Representation of Optical Proximity Correction Geometry Based on Fourier Descriptor Method
Date Issued
2009
Date
2009
Author(s)
Hsieh, Tsung-Che
Abstract
The geometry complexity of Optical Proximity Corrected (OPC) Mask and the aerial image are often overwhelming. To speed up the processing time of mask development, OPC quality assurance, and data storage, compact representation of the OPC mask and aerial image are of great importance.n this thesis, we proposed a novel compact representation method based on the fourier descriptor (FD) method. FD is a widely used contour representation method for image processing. Our experimental result show that more than 5x reduction ratio of the data volume are observed with minor errors. To the best of authors knowledge, FD is appliedo OPC data representation in the first time.
Subjects
Fourier descriptor
Fourier transform
Optical Proximity Correction
aerial image simulation
shape representation
Type
thesis
File(s)![Thumbnail Image]()
Loading...
Name
ntu-98-R94943159-1.pdf
Size
23.32 KB
Format
Adobe PDF
Checksum
(MD5):f042a228d36cefd744f686bf8706828d