Development of a nano-positioning planar motion stage

Journal

2010 2nd International Conference on Mechanical and Electronics Engineering

Journal Volume

1

Date Issued

2010

Author(s)

Chung, T.-T.

Chu, C.-H.

Fan, K.-C.

Yen, J.-Y.

Szu, K.-I.

DOI

10.1109/ICMEE.2010.5558581

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-77957802390&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/356045

Type

conference paper