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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Optical-constant Tunable AlO/CrO/ZrO Optical Superlattices for APSM working in ArF Lithography
Details
Optical-constant Tunable AlO/CrO/ZrO Optical Superlattices for APSM working in ArF Lithography
Journal
45th EIPBN
Pages
31-32
Date Issued
2001-01
Author(s)
L. A. Wang
F.D. Lai
LON A. WANG
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/294535
Type
conference paper