Direct fabricating patterns using stamping transfer process with PDMS mold of hydrophobic nanostructures on surface of micro-cavity

Resource

MICROELECTRONIC ENGINEERING, 88(6), 849-854

Journal

Microelectronic Engineering

Pages

849-854

Date Issued

2011

Date

2011

Author(s)

Huang, Yi-Hao

Wu, Jing-Tang

DOI

URI

Type

journal article

File(s)

Name

247.pdf

Size

23.45 KB

Format

Adobe PDF

Checksum

(MD5):f6ca465dc6da04d9081e24ca8782c72f