Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net

Resource

Robotics and Automation, 2000. Proceedings. ICRA '00. IEEE International Conference on

Journal

IEEE International Conference on Robotics and Automation

Pages

-

Date Issued

2000-04

Date

2000-04

Author(s)

Kuo, Chung-Hsien

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

00846353.pdf

Size

712.5 KB

Format

Adobe PDF

Checksum

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