Localized corrosion effects and modifications of acidic and alkaline slurries on copper chemical mechanical polishing

Resource

Applied Surface Science 210 (3-4): 190-205

Journal

Applied Surface Science

Journal Issue

210

Pages

190-205

Date Issued

2003

Date

2003

Author(s)

Tsai, Tzu-Hsuan

URI

Type

journal article

File(s)

Name

05.pdf

Size

518.58 KB

Format

Adobe PDF

Checksum

(MD5):18f1a0637ed6ae56c77a577694b11eb2