The investigation of Combustion Synthesis of Nanosized Silicon Powder from HMDSA and HMDSO in the Premixed Methane Flat Flame

The Gas-phase combustion synthesis of nanosized silicon can makes continuously high-purity product by the property of self-purifying and homologous nucleation. Previous studies show that the diameter of product is influenced by some experimental parameters, such as fuel, precursor, concentration, reaction temperature, and reaction burner. This study adds HMDSA and HMDSO into the premixed methane flat flame burner to establish the relationship of silicon product diameter under the different fuel-air ratio, concentration of precursor, and the others operation conditions.