Light enhancement of silicon-nanocrystal-embedded SiOx film on silicon-on-insulator substrate
Journal
Japanese Journal of Applied Physics
Journal Volume
50
Journal Issue
4 PART 2
Date Issued
2011
Author(s)
Abstract
We reported the light enhancement from a silicon-nanocrystal-embedded SiO x film on a silicon-on-insulator (SOI) substrate in the visible light range. The light emission from the annealed SiO x film is one order stronger than the emission from a nonannealed SiO x film. Compared with the SiO x film on a Si substrate, two-fold enhancement in light emission from the SiO x film on a SOI substrate was also observed. The enhancement was attributed to better vertical confinement of optical field in the SiO x film on a SOI substrate.
Type
journal article