Effects of etching holes on complementary metal oxide semiconductor- microelectromechanical systems capacitive structure

Journal

Journal of Intelligent Material Systems and Structures

Journal Volume

24

Journal Issue

3

Pages

310-317

Date Issued

2013

Author(s)

Tu, W.-H.

Chu, W.-C.

Lee, C.-K.

Chang, P.-Z.

DOI

10.1177/1045389X12449917

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/486158

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84872732436&doi=10.1177%2f1045389X12449917&partnerID=40&md5=140cf3078a96a99c5c90c73cc355f668

Type

conference paper