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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Water-induced room-temperature oxidation of Si-H and -Si-Si- bonds in silicon oxide
Details
Water-induced room-temperature oxidation of Si-H and -Si-Si- bonds in silicon oxide
Journal
Journal of Applied Physics
Journal Volume
80
Journal Issue
2
Pages
1171-1176
Date Issued
1996
Author(s)
Liao, W.-S.
SI-CHEN LEE
DOI
10.1063/1.362915
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/498805
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-0001053614&doi=10.1063%2f1.362915&partnerID=40&md5=32656c229a1dad97e8f2042de5a7651e
SDGs
[SDGs]SDG6
Type
journal article