Effect of metal buffer layer on surface acoustic wave in AlN/diamond structure
Journal
Ferroelectrics
Journal Volume
408
Journal Issue
1
Pages
25-31
Date Issued
2010
Author(s)
Abstract
This study investigates the propagation characteristics of surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures using the finite element method. Propagation characteristics in AlN/thin metal film/diamond and AlN/diamond structures are also evaluated for comparison. Results indicate that by adding the Mo layer at the AlN/diamond interface, the maximum coupling coefficient can be upgraded to 2.24%, which is 5% and 81% higher than that of AlN/thin metal film/diamond and AlN/diamond structures, with a very high phase velocity of 10745 m/s. The effects of electrodes on surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures are also discussed.
Type
conference paper