Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography

Resource

Microelectronic Engineering 84 (5-8): 750-754

Journal

Microelectronic Engineering

Journal Issue

84

Pages

750-754

Date Issued

2007

Date

2007

Author(s)

Chen, H.L.

Huang, K.T.

Lin, C.H.

Wang, W.Y.

Fan, Wonder

URI

Type

journal article

File(s)

Name

29.pdf

Size

652.76 KB

Format

Adobe PDF

Checksum

(MD5):18cbba9d76a81fbbb912994f1cfc4ca7