Micromachined 22 GHz PI filter by CMOS compatible ICP deep trench technology

Journal

Electronics Letters

Journal Volume

43

Journal Issue

7

Pages

398-399

Date Issued

2007

Author(s)

DOI

10.1049/el:20070437

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-34047120832&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/332326

SDGs

[SDGs]SDG7

Type

journal article