Polycide contact interface to suppress squegging in micromechanical resoswitches

Journal

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Pages

1273-1276

Date Issued

2014

Author(s)

Lin, Y.

Liu, R.

Li, W.-C.

Nguyen, C.T.-C.

DOI

URI

URL

Type

conference paper