Solid-immersion micromirror with enhanced angular deflection for silicon-based planar lightwave circuits
Journal
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Pages
131-132
Date Issued
2005
Author(s)
Abstract
We report on a MEMS-based on-chip solid-immersion micromirror (SIM), which provides enhanced angular deflection and reduced diffraction loss. The SIM is driven by rotary comb-drive actuators. Maximum mechanical scan angle of 8 degree is achieved
SDGs
Type
conference paper