Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors

Journal

IEEE Photonics Technology Letters

Journal Volume

13

Journal Issue

6

Pages

606-608

Date Issued

2001

Author(s)

Su, G.-D.J.

Toshiyoshi, H.

Wu, M.C.

GUO-DUNG JOHN SU

DOI

10.1109/68.924038

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0035362738&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/293462

Type

journal article