A novel fabrication method for suspended high-aspect-ratio microstructures

Resource

Journal of Micromechanics and Microengineering 15 (11): 2184-2193

Journal

Journal of Micromechanics and Microengineering

Journal Volume

15

Journal Issue

11

Pages

2184-2193

Date Issued

2005

Date

2005

Author(s)

Kuo, W.-C.

Yang, Y.-J.

URI

Type

journal article

File(s)

Name

07.pdf

Size

2.11 MB

Format

Adobe PDF

Checksum

(MD5):f21319ff956a5239f524c5b8d849517b