Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
Journal
Surface and Coatings Technology
Journal Volume
427
Date Issued
2021
Author(s)
Abstract
Atomic layer plasma treatment (ALPT) enhances the corrosion protection of the ZrO2 film prepared by thermal-driven ALD mode (TALD-ZrO2) and further reduces the corrosion rate of Mg[sbnd]Ca alloy by more than an order of magnitude. The ALPT effect significantly increases the crystallinity and reduces the oxygen defects of TALD-ZrO2 film. The ALPT time of 30 s has the most increase in the polarization resistance of TALD-ZrO2 film, from 1.8kΩ·cm2 to 74.7kΩ·cm2. The enhancement of corrosion resistance of TALD-ZrO2 film caused by the 30s-ALPT is equivalent to the thickness effect of increasing the thickness from 200 cycles to 300 cycles. ALPT technique is considered as a potential and feasible method to prepare TALD-ZrO2 films with high film quality and excellent corrosion protection. ? 2021 Elsevier B.V.
Subjects
Atomic layer deposition
Atomic layer plasma treatment
Corrosion protection
Magnesium-calcium alloy
Atoms
Binary alloys
Calcium alloys
Corrosion rate
Corrosion resistance
Corrosion resistant alloys
Crystallinity
Magnesium alloys
Zirconia
Atomic layer
Atomic-layer deposition
Cristallinity
Magnesium-calcium alloys
Orders of magnitude
Plasma treatment
Thermal driven
Treatment effects
ZrO 2 films
Plasma applications
Type
journal article