Novel Self-shrinking Mask for Sub-3 nm Pattern Fabrication

Journal

Scientific Reports

Journal Volume

6

Date Issued

2016

Author(s)

Yang P.-S.

Cheng P.-H.

Kao C.R.

DOI

10.1038/srep29625

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84978897498&doi=10.1038%2fsrep29625&partnerID=40&md5=d6f26c34f1f6e791a6e0dcc8bf2f5a83

https://scholars.lib.ntu.edu.tw/handle/123456789/432595

SDGs

[SDGs]SDG7

Publisher

Nature Publishing Group

Type

journal article