Using colloid lithography to fabricate silicon nanopillar arrays on silicon substrates

Journal

Journal of Colloid and Interface Science

Journal Volume

367

Journal Issue

1

Pages

40-48

Date Issued

2012

Author(s)

Chen, J.-K.

Qui, J.-Q.

Fan, S.-K.

Kuo, S.-W.

Ko, F.-H.

Chu, C.-W.

Chang, F.-C.

DOI

10.1016/j.jcis.2011.10.044

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-83355162403&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/373124

SDGs

[SDGs]SDG6

Type

journal article