Structural Design and Analysis of a Precision Positioning Planar Motion Stage
Date Issued
2010
Date
2010
Author(s)
Chu, Chih-Hsiang
Abstract
This study proposes the structural design and analysis of a precision positioning planar motion stage. The planar motion stage will have characteristics of high precision, long travel range, and nano-positioning accuracy. The stage consists of a stage base, a carriage supported by four air bearings, four linear motors, and a two-dimensional optical encoder. Configuration design is proposed for better operation characteristics. The structural characteristics of the stage are analyzed through static finite element analysis. A light weight design of the carriage is carried out through optimum design method. Modal analyses of the carriage in different conditions are also considered. The deformation of the carriage due to inertial loading by 0.5g acceleration is analyzed too. An opposed air bearings configuration in the planar motion stage is proposed to solve the vibration problem from air pressure variation. A mechanism by magnetic force to calibrate the tilt problem of the carriage and a homing alignment concept are proposed. The travel range of the stage in X-direction and Y-direction is 50 mm x 50 mm, and the maximum acceleration of the carriage after weight reduction by optimization will reach more than 1g.
Subjects
Planar motion stage
air bearing
linear motor
optical encoder
finite element analysis
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