Silicon-Based High Frequency Ultrasonic Nozzles for Nanoparticles Synthesis
Date Issued
2005-07-31
Date
2005-07-31
Author(s)
蔡振水
DOI
932218E002119
Abstract
Design, simulation and fabrication of MHz silicon ultrasonic nozzles using multiple
Fourier horns and actual atomization and their applications to micro/nano materials
technology have been accomplished through the NSC support. Such nozzles possess a number
of advantages over conventional metal-based bulk-type ultrasonic nozzles such as
MEMS-based micro-fabrication technology for mass production, much higher ultrasonic
frequency and thus much smaller drop diameter, much narrower drop-size distribution, and
much lower electric drive power requirement. Monodisperse drops 7 μm in diameter were
produced by atomization of water and gold colloid solutions using a 3-Fourier horn 0.5 MHz
ultrasonic nozzle. The gold nanoparticles (17 to 30 nm in diameter) spray-coated on silicon
substrates remain well dispersed.
Subjects
ultrasonic nozzles
multiple-Fourier horn
ultrasonic atomization
monodisperse
drops
drops
nanoparticles
impedance
longitudinal vibration
spray pyrolysis
Publisher
臺北市：國立臺灣大學光電工程學研究所
Type
report
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932218E002119.pdf
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