Phase and thickness dependence of thermal diffusivity in a-SiCxNy and a-BCxNy

Journal

?Thin Solid Films

Journal Volume

420

Pages

205-211

Date Issued

2002

Author(s)

S. Chattopadhyay

S. C. Chien

S. T. Lin

C. T. Wu

K. H. Chen

DOI

https://doi.org/10.1016/S0040-6090(02)00747-2

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503928

Publisher

Elsevier B.V.

Type

journal article