Multi-function thermopile sensors fabricated with a MEMS-compatible process

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

26

Journal Issue

2

Pages

242-247

Date Issued

2013

Author(s)

Sin, L.-M.

Pan, T.-T.

Tsai, C.-W.

Chou, C.-F.

Hong, J.-Q.

Tsai, J.-C.

DOI

10.1109/TSM.2013.2253137

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-84877256329&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/379947

Type

journal article