Multi-function thermopile sensors fabricated with a MEMS-compatible process
Journal
IEEE Transactions on Semiconductor Manufacturing
Journal Volume
26
Journal Issue
2
Pages
242-247
Date Issued
2013
Author(s)
Abstract
In this paper, we present micromachined multifunction thermopile sensors based on the Seebeck effect. A single sensor is able to perform measurement on temperature, pressure, humidity, and percentage of a gas constituent. Three different designs are employed and compared.
SDGs
Type
journal article